In-line Vetical Static Sputter (SuVas-VS Series)
- LST Series is a device for depositing oxide and metal materials in a vacuum state on a large-area substrate for thin film transistor manufacturing.
- -Vertical Static Type
-Optimized design reduces equipment weight and minimizes foot print
-Minimize particles inside chamber through non-contact conveying system
-Possible to form multi layer
-Improved thin film quality and maximizes target use efficiency by moving magnet of Cathode part
- -Substrate size: 8th generation glass or more -Tact Time: Within 60sec (TFT stop film formation type) div>-Deposition materials: ITO, SIO, TIO, ZnO, CrOx, AZO, GZO, IGZO div>-Power source: DC, Pulsed DC or MF div>-Thickness uniformity: Within ± 10% (Static film formation type) div>-Surface resistance: ± 12 Within% div>-Heating Temperature: 250 ° C (Based on Board Temperature) div>-Heating Temperature Uniformity: Within 15 ° C div>