Products

Solar
 

SuVAS™ C-Series

Outline

  • SuVAS™ C-Series are used for thin-film solar cell production process by coating oxide or metallic materials on large size substrate.

Features

  • - Horizontal cluster type sputtering system
    - Minimizing the footprint and weight of the equipment throughout optimized design
    - Capable of forming multiple layers in one process cycle
    - Maximizing the efficiency of target usage and improving quality of thin-film by moving the magnet on the cathode part

Specifications

  • - Applicable Substrate Size      : Standard Gen 5th Substrate

    - Tact Time                       : within 80sec

    - Target Materials                : AZO, GZO, AI, Ag

    - Power Source                  : DC, Pulsed DC

    - Thickness Uniformity          : within ± 10%

    - Sheet Resistance              : within ± 12%

      Heating Temp.                 : 150℃ (based on substrate temp.)

      Heating Temp. Uniformity     : within ± 15%