Products

Sputtering System

Roll-to-Roll System(Flexible Substrate)

Outline

  • Roll to Roll SPUTTER is widely used for deposition on flexible film.
    The application of Roll to Roll SPUTTER varies depending on substrate type and product.

Features

  • 2 Process Chambers and 1 L/Un-loading Chamber
    16 Cathodes with dual cylindrical targets using pulsed DC
    Rs measurement by In-situ Non-Contact Eddy Current type
    Tension controlled by load-cell
    Slit Valve (Lip Seal) preserves vacuum in the process chambers

Specifications

  • -Application

    Web sputtering process on Both sides or Single side of flexible material

    -Number of Coating Sources

    1 ~ 5 Sources / Drum

    -Substrate Materials

    PET, PEN, PI, PA, PC,TAC, Metal Foils, etc.

    -Film Width ( )

    500 ~ 1,350

    -Substrate thickness for POLymers ( )

    25 ~ 500

    -Max Roll Diameter ( )

    800

    -Substrate Speed (m/min)

    0.5 ~ 25

    -Tension (N)

    70 ~ 700

    -Base Pressure (Torr)

    2 × 10 -6

    -Coating drum temperature ( )

    -15 to 150