OLED Vacuum Oven System
- Vacuum oven system for pre-evaporation process to remove impurities such as residual solvent or water vapor which shorten OLED panel defects and life.
- -Composition: Loading Chamber, Transfer Module Chamber, Vacuum Oven, Cooling Chamber
-Heater: Plate type heater fine temperature tuning activated.
- -Applicable substrate size: 370mm x 470mm ~ 2940mm x 3370mm
Heat: 250oC max, uniformity ≤ ± 5% -Cooling: 10oC ~ 70oC
-Vacuum Level: Ultimate 5.0E-7Torr (within 12 hours)
Treatment time: 120 seconds ~ 1000 seconds