Products
Sputtering System
Loader System
Outline
- A return system that combines/disconnects substrates into the carrier and injects/discharges into the deposition equipment for processing.
Features
- - Board - Horizontal and Vertical Transformation, Carrier - Vertical Return
- Carrier Automatic Replacement System Based on Usage
- Minimize particles by applying a non-contact return system
- Optimized simulation link design minimizes structure deflection (Max 0.1mm)
Specifications
- Size of substrate response
Max 2,940 X 3,370mm (G10.5)
- Tact Time: Equal Accuracy based on deposition equipment
Level Accuracy: ≤±1mm / Index Repetability: ≤±0mm
- Configuration
Glass Loader/Unloader, Glass Handling Robot, Carrier Station, Transfer Station, Magazine, Safety Fence