R&D

Performance

Advanced sputtering technology
  • Plasma monitoring and thickness control, TFT active layer inspection, Magnetic levitation conveyance, Hybrid operation system, Under layer low damage deposition technology (Microwave applied)

연구실적

Isotopic Battery
Equipment: Ni-63 plating equipment, unit cell junction equipment
Key Technology: Ni-63 frontal deposition technology, radioactive material shielding technology, unit module integration technology
Application: Radiation safety monitoring system power, standby power of military facilities

연구실적

Semiconductor Packaging
Equipment: Ti-Cu Sputter
Key Technology: Individual control of wafer, High Throughput, Structure of shield minimizing particle
Application: Sputter for metal wiring deposition for WLP

연구실적

Steel Industry
Equipment: Horizontal PVD
Key Technology: Vacuum Lock, Plasma surface treatment technology
Application: Automotive steel dry coating equipment

연구실적

Bio
Equipment: Prostate treatment kit manufacturing equipment
Key Technology: I-125(Iodine) packaging technology
Application: Prostate cancer treatment kit

연구실적

Display
Equipment: Microwave assisted sputter, active layer single membrane inspection equipment , magnetic levitation system, etc.
Key Technology: Microwave transmission unit design technology, microwave leakage prevention technology, oxide semiconductor single membrane and TFT characteristic matching technology
Application: Advanced Sputter

연구실적

Solar
Equipment: High-speed heat treatment equipment applied with Se shower module
Key Technology: Se shower module process control technology, Shower module structure H/W technology
Application: CIGS thin film solar cell manufacturing equipment