Advanced. VAcuum &
Clean equipment Optimizer
SuVAS™ V-Series are used for thin film deposition by coating oxide (TCO and buffer la..
AEON™ Atomic layer deposition (ALD) system can produce a dense and conformal Zinc Oxy..
SuVAS™ C-Series are used for solar cell production process by coating oxide (TCO laye..
The furnace thermally processes batches of glass solar circuits in a controlled atmos..
SuVAS™ H-Series are used to deposit thin-film layers, such as back electrode, CIG pre..