Products

OLED System
 

OLED TFE In line System

Outline

  • OEC Series is an equipment used in the production process of OLED by cover-glass and organic-material coated substrate capsule to prevent oxidation of H2O and O2.

Features

  • -Composition: an Octagonal Cluster Chamber (including vaccum transfer robot), Hexagonal Glove Box
    (including ATM transfer robot), Plasma treating machine, Getter attacher, Seal dispenser, UV assembler, and Return Conveyor
    -Control of H2O and O2 inside the chamber using a gas purifier
    -Dual production mode: UV curing mode using liquefied sealant and laser sealing mode using frirt sealant
    -Vacuum parts: Dry pump + Booster pump

Specifications

  • - 기판 크기 : 730mm X 460mm
    - Tact Time : 3.5min
    - Cover Material : Glass
    - No. of Substrate Loading : 48pcs. (24pcs. X 2 Stocker)
    - Process Circumstance : H2O < 1ppm, O2 < 10ppm
    - Encapsulation Accuracy : ± 7㎛ 이내
    - UV 균일도 : ± 5% 이내 (based on substrate area)
    - Glass 이송 방법 : Robot and Magnetic Roller