OLED Vacuum Transfer System
- This system is a large-area deposition equipment that can deposit OLED organic materials on large area glass through linear deposition source, rather than organic point evaporator composed of existing point deposition sources.
- -Inter-back type equipment consisting of loader, load-lock chamber, and process chamber
-Process is progressed on the carrier by combining mask and glass
-Linear deposition source under Process Chamber moves forward / backward
-Vaccum Pump consists of Low Vacuum for Dry + Booster Pump and High Vacuum for TMP and Cryo Pump
- -Substrate Size: Max G5 (1,500 X 1,850mm)
-Driving method: Carrier is driven on the roller.
-Base vacuum degree: Load-lock Ch 2.0E-6Torr, Process Chamber 8.0E-7Torr