Products
Sputtering System
In-line Vetical Static Sputter (SuVas-VS Series)
Outline
- LST Series is a device for depositing oxide and metal materials in a vacuum state on a large-area substrate for thin film transistor manufacturing.
Features
- -Vertical Static Type
-Optimized design reduces equipment weight and minimizes foot print
-Minimize particles inside chamber through non-contact conveying system
-Possible to form multi layer
-Improved thin film quality and maximizes target use efficiency by moving magnet of Cathode part
Specifications
- -Substrate size: 8th generation glass or more -Tact Time: Within 60sec (TFT stop film formation type)-Deposition materials: ITO, SIO, TIO, ZnO, CrOx, AZO, GZO, IGZO-Power source: DC, Pulsed DC or MF-Thickness uniformity: Within ± 10% (Static film formation type)-Surface resistance: ± 12 Within%-Heating Temperature: 250 ° C (Based on Board Temperature)-Heating Temperature Uniformity: Within 15 ° C
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