Products
Solar
Cluster System (Horizontal Type)
Outline
- SuVAS™ C-Series are used for solar cell production process by coating oxide (TCO layer and buffer layer) and metallic materials (back electrode) on large size substrate.
Features
- Horizontal cluster type system
Minimizing the footprint and weight of the equipment throughout optimized design
Capable of forming multiple layers in one process cycle
Maximizing the efficiency of target usage and improving quality of thin-film by moving the magnet on the cathode part
Specifications
-Applicable Substrate Size
Max Gen 6th Substrate
-Tact Time
Within 80sec
-Target Materials
Ag, Al, Al2O3, AlNd, AZO, CIGS, Cr, Cu, CuGa, CuIn, GZO, IGZO, In, ITO, IZO, Mo, MoTi, MoW, Ni, Se, SiO2, TiO2, ZnO
-Power Source
DC, Pulsed DC or MF
-Thickness Uniformity
Within ±10%
-Sheet Resistance Uniformity
Within ±12%
-Heating Temp
Max 250℃ (Based on substrate temp.)
-Heating Temp. Uniformity
Within ±15℃