Products
Solar
Vertical In-Line System
Outline
- SuVAS™ V-Series are used for thin film deposition by coating oxide (TCO and buffer layer) and metallic materials (back electrode) on large size substrate.
Features
- Vertical in-line type system
Minimizing the footprint and weight of the equipment throughout optimized design
Minimizing particles inside the chamber using contactless transfer system (Magnetic Levitation System)
Capable of forming multiple layers in one process cycle
Maximizing the efficiency of target usage and improving quality of thin-film by moving the magnet on the cathode part
Specifications
-Applicable Substrate Size
Max Gen 10.5th Substrate
-Tact Time
Within 60sec
-Target Materials
Ag, Al, Al2O3, AlNd, AZO, CIGS, Cr, Cu, CuGa, CuIn, GZO, IGZO, In, ITO, IZO, Mo, MoTi, MoW, Ni, Se, SiO2, TiO2, ZnO
-Power Source
DC, Pulsed DC or MF
-Thickness Uniformity
Within ±5%
-Sheet Resistance Uniformity
Within ±12%
-Heating Temp
Max 250℃ (Based on substrate temp.)
-Heating Temp. Uniformity
Within ±15℃