Products

Solar
 

SuVAS™ V-Series

Outline

  • SuVAS™ V-Series are used for thin-film solar cell production process by coating oxide or metallic materials on large size substrate.

Features

  • - Vertical in-line type sputtering system
    - Minimizing the footprint and weight of the equipment throughout optimized design
    - Minimizing particles inside the chamber using contactless transfer system
    - Capable of forming multiple layers in one process cycle
    - Maximizing the efficiency of target usage and improving quality of thin-film by moving the magnet on the cathode part
    - Available system types : vertical in-line type / horizontal cluster type / horizontal in-line type

Specifications

  • - Applicable Substrate          : Standard Gen 5th Substrate

    - Tact Time                     : within 60sec

    - Target Materials               : AZO, GZO, AI, Ag

    - Power Source                 : DC, Pulsed DC or MF

    - Thickness Uniformity         : within ± 10% (static type), within ± 5% (dynamic type)

    - Sheet Resistance             : within ± 12%

      Heating Temp.                 : 250℃ (based on substrate temp.)

      Heating Temp. Uniformity     : within ± 15%